44636
Accession Number
7504
Title Of Article Chaper
Resolution in scanning electron microscopes
Title Of Journal Book
Research/Development
Volume
24
Issue
6
Pages
32-34
Collation
5 figs.
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Abstract
Describes the principle of the scanning electron microscope, which generates an image by treating the specimen field as a series of discrete elements that are irradiated in sequence rather than by simultaneous illumination. The resolution of the image is dependent on the size of the electron beam spot -- the smaller the spot, the greater the number of images that can be differentiated. The article discusses ways of improving the resolution. -- AATA
pub_id
44636