The continuing improvement in energy resolution of semiconductor X-ray spectrometers has let to interest in the use of these devices at energies less than 2 keV. This is an energy region of potential analytical interest since the K X-rays of several elements of biological and chemical importance occur at these energies. However, the low X-ray fluorescence yield in low-Z elements, combined with the absorption of low energy X-rays due to the windows of both the detector and the vacuum enclosure, have made work in this energy region impossible with the standard semiconductor detector X-ray spectrometers. In the present work, the X-ray absorption path has been reduced to a minimum to permit low-energy X-ray studies of excitation, entry window thickness, detector linearity and resolution. Using electron beam excitation on low-Z targets, we have performed measurements of characteristic K X rays of elements down to and including carbon (277 eV).