24056
Title Of Article Chaper
Scanning laser microscope does not require vacuum
Title Of Journal Book
Metal progress
Volume
130
Issue
1
Pages
60
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Abstract
The Lasersharp scanning laser microscope, made by Ion Beam Technologies, is used in industry to analyze and inspect semiconductor devices and metal specimens. Unlike scanning electron microscopes, it does not require a vacuum for operation, which may reduce costs. Resolution is 0.3mum. The use of a light probe rather than electrons eliminates specimen damage from electrical charge buildup. -- AATA
Keywords
Microscope Scanning Laser;Microscope Scanning Electron; Examination Metals;Examination Specimen Damage AATA
pub_id
24056