19789
Accession Number
15358
Title Of Article Chaper
Magnetron sputtering: what we have and what we need
Title Of Journal Book
Industrial research and development
Pages
148-149
Collation
photo
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Abstract
Planar magnetron sputtering technology has undergone significant advancement since the first systems were introduced in 1974. The technology will reach maturity in the next five years provided significant gains can be made in the areas of cathode design and substrate sputter cleaning. -- AATA
Keywords
Glass decorative architectural;Planer magnetron sputtering; Solar barrier film;Light filter;Metal cleaning gold AATA
pub_id
19789