16823
Accession Number
30596
Author
Pouchou, Jean-Louis; Boivin, Denis; Beauchene, Pierre; Le Besnerais, Guy; Vignon, Fabien
Author Affiliation
ONERA, Department DMMP; ONERA, Department DMMP; ONERA, Department DMSC; ONERA, Department DTIM; ONERA, Department DTIM
Title Of Article Chaper
3D Reconstruction of Rough Surfaces by SEM Stereo Imaging
Title Of Journal Book
Mikrochimica Acta
Volume
139
Pages
135-144
Collation
10 p. : ills.
Reference Bibliography
Includes bibliographic references
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Abstract
The paper describes the current state of a multidisciplinary research project which aims to apply advanced stereovision methods to the 3D reconstruction of rough surfaces using scanning electron microscopy (SEM) imaging. SEM stereo imaging compares very favourably to atomic force microscopy (AFM) in a medium range corresponding to elevations less than 10[mu]m and scanned size less than 100[mu]m. But the interest of the stereoscopic method is that it enables to characterise wider fields with higher elevations.
Keywords
3d; reconstruction; rough; surface; sem; image; stereovision; stereoscopic
pub_id
16823