14520
Accession Number
37846
Title Of Journal Book
The Role of Microscopy in Semiconductor Failure Analysis
Volume
25
Collation
108 p. : ills.
Reference Bibliography
Includes bibliographic references
Language Of Text
English
Literature Type
Monograph
Literature Level
Monographic
Keywords
safety;methodology;failure;analysis;instrument;application;lm;sem;microscopy;scanning;electron;light;microradiography;irm;slm;sam;seam;slam;tem;xrt;stm;afm;snlm;leem;technique;emission;thermal;imaging
pub_id
14520