7314
Accession Number
9194
Title Of Article Chaper
Elemental Depth Profiling Using Thermal Neutrons
Title Of Journal Book
Center for Analytical Chemistry, National Bureau of Standards
Collation
0.708333333
Literature Level
Analytic
Abstract
A unique Neutron Depth Profiling facility is being developed at the National Bureau of Standards for the non-destructive determination of depth distributions in real-time. The goal of the program is to provide concentration profiles for the characterization of the near-surface regime of semiconductors, metals, metallic glasses and glasses in general to depths of several micrometers.
Keywords
neutron;semiconductors;depth;profiling
pub_id
7314