7314
Accession Number
9194
Author
Fleming, R.F.; Downing, R.G.
Title Of Article Chaper
Elemental Depth Profiling Using Thermal Neutrons
Title Of Journal Book
Center for Analytical Chemistry, National Bureau of Standards
Collation
0.708333333
Literature Level
Analytic
Abstract
A unique Neutron Depth Profiling facility is being developed at the National Bureau of Standards for the non-destructive determination of depth distributions in real-time. The goal of the program is to provide concentration profiles for the characterization of the near-surface regime of semiconductors, metals, metallic glasses and glasses in general to depths of several micrometers.
Keywords
neutron;semiconductors;depth;profiling
pub_id
7314