7218
Accession Number
22796
Author
Many, A.; Goldstein, Y.; Weisz, S.Z.; Resto, O.
Author Affiliation
The Hebrew University. Racah Institute of Physics;The Hebrew University. Racah Institute of Physics;University of Puerto Rico. Department of Physics; University of Puerto Rico. Department of Physics
Title Of Article Chaper
Auger electron spectroscopy for quantitative analysis
Title Of Journal Book
Appl. Phys. Lett
Volume
53
Issue
3
Pages
192-194
Collation
3 p. : ill., 2 figs.
Reference Bibliography
Includes bibliographical references
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Abstract
A simple mathematical analysis shows that unless the ratio of the instrumental resolution width to the natural Auger linewidth is less than about 0.3, the measured line intensities do not represent accurately the atomic concentrations. To overcome this difficulty, a universal curve is presented whereby the experimentally measured line intensities can be corrected so as to represent quite accurately the relative atomic concentrations in one's sample. Unfortunately, however, the available sensitivity data required for quantification were not always measured with sufficient instrumental resolution. It is our contention that htere is a need for new sensitivity measurements in which the required resolution is ensured.
Keywords
Auger electron spectroscopy;quantitative analysis;atomic concentration
pub_id
7218