The comparison of the three methods is presented. Information available from ion scattering spectroscopy (ISS) and ESCA is illustrated by comparing plots of carbon/oxygen intensity ratio vs. monomer composition for both methods. Both ESCA and ISS yield linear correlations, ESCA having the higher correlation coefficient. The ISS plot had some deviations which could not be explained by steric effects alone. Static secondary ion mass spectrometry results were interpreted by using a backbone/side chain model of polymer structure: this explains ions generated from bond breaking along the hydrocarbon backbone and the pendent side chain functionality which is varied in the polymer series of polymethacrylates. Positive ion spectral patterns are interpreted for short chain alkyl, isomeric butyl and cylic and long chain alkyl functionalities. -- AATA