5074
Accession Number
38370
Title Of Article Chaper
Fabrication of Ultrathin Semiconductors on Insulator Structures by Materials Integration Techniques
Title Of Journal Book
Structure: Struers Journal of Materialography
Issue
36
Pages
44515
Collation
5 p. : ills.
Reference Bibliography
Includes bibliographic references
Language Of Text
English
Literature Type
Serial
Literature Level
Analytic
Keywords
fabrication;structure;material;integration;technique;process;characterization
pub_id
5074